Title: Ultrapure CEDI for Microelectronics Applications

This paper discusses an innovative CEDI process combined with a very cost effective system design for producing ultrapure water for microelectronics applications.

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   Person Information

  •     Gifford, Joseph  -  Evoqua Water Technologies

  •     Jha, Anil D.  -  Evoqua Water Technologies
   Application Sequencing
 334413 - Semiconductor and Other Electronic Component Manufacturing                
Company  Product  Process  Other  Subjects  Event  Event  Date  Location  Publication  Publication  Date Text  Descriptor

  • Evoqua Water Technologies

  • Electrodeionization

 

 

 

 

 

 

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