Title: Membranes for Oxygen Removal in 300 mm Semiconductor Processing

This paper discusses how low oxygen specifications in 300 mm semiconductor processing can be met with degasification membranes.

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 221112 - Fossil Fuel 化石燃料  Coal-Fired 燃煤              
Company  Product  Process  Other  Subjects  Event  Event  Date  Location  Publication  Publication  Date Text  Descriptor
  • Membrana

  • Demineralizer

  • Degasification

  • Demineralization







  • Paper