Title: Membrane Processing for Water Treatment in the Semiconductor Industry

This paper discusses the overall UPW loop in a Semiconductor plant. Membrane Degasification is stied as being the technology of the future for deoxygenating to 1 ppb.

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   Person Information
   Application Sequencing
 221310 - Water Supply & Irrigation Systems                
Company  Product  Process  Other  Subjects  Event  Event  Date  Location  Publication  Publication  Date Text  Descriptor

  • Membrana

  • Demineralizer

  • Degasification

  • Demineralization

 

 

 

 

 

 

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