Title: Activated Water for Improved Megasonic Cleaning

Improved megasonic wafer cleaning with activated water using hydrogen and liqui-Cel Contactors.

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 221112 - Fossil Fuel 化石燃料  Coal-Fired 燃煤              
 325998 - All Other Miscellaneous Chemical Product and Preparation                
Company  Product  Process  Other  Subjects  Event  Event  Date  Location  Publication  Publication  Date Text  Descriptor
  • Membrana

  • Demineralizer

  • Degasification

  • Demineralization







  • Case Study