Title: AMC monitoring in fabs with spectroscopic methods

Airborne molecular contaminants clearly affect semiconductor yield and can’t be completely removed by modern filters in cleanroom fabs. Thomas Benoy from the $2.1m MetAMCII project says it is aiming to address the increasing need for measurement capabilities from the low ppb to the ppt in real time with low uncertainties

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   Application Sequencing
Company  Product  Process  Other  Subjects  Event  Event  Date  Location  Publication  Publication  Date Text  Descriptor
  • Air Monitoring

  • Air Pollution Control Systems

  • Air Quality Control System

  • Contamination Control

  • Monitoring

 

 

 

 

 

 

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